Claudio Arnone (b.1954)


Full professor

Member of SPIE - Society of Photo-Optical Instrumentation Engineers

Faculty of Engineering, University of Palermo


Current teaching (2010): Microtechnology, Electronics



List of academic courses held from 1983 to 2012:

- Optoelectronics

- Microtechnology

- Biophotonics

- General Electronics

- Digital Electronics


International research experience at:

- Dept. of Electrical Engineering, MIT, Cambridge, MA (USA)

- Lincoln Laboratory, Lexington, MA (USA)

- Dept. of Physics, University of Armidale, NSW (Australia)


Main active international links

- Argonne National Laboratory, Center for Nanoscale Materials, USA

- Brookhaven National Laboratory, USA

- Dept. of Electrical and Computer Engineering, National University of Singapore

- Dept. of Electrical Communication Engineering, Indian Institute of Science,  Bangalore, India

- Fraunhofer Institute for Applied Optics, Germany

- Departamento de Física, Universidade Federal de Minas Gerais, Belo Horizonte - Brasil



Research areas and related selected publications


Surface processing and microlithography (laser direct writing)


- G. Lullo, R. Leto, M. Oliva, and C. Arnone: “Multilevel pattern generation by GaN laser lithography: an application to beam shaper fabrication”, Proc. SPIE Vol. 6290, 62900A (Sep. 9, 2006).


- G. Lullo, A. Castiglia, G. Carini, C. Arnone: "Chalcogenide thin films for direct resistors fabrication and trimming", Materials Science and Semiconductor Processing 7,  p. 337-341, Elsevier (2004).


- G. Lullo, C. Arnone, C.G. Giaconia: "Technologies for the fabrication of cylindrical fine line devices", Microelectronic Engineering 35, 417 (1997).


- C.Giaconia, G.Grasso and C.Arnone: "Resist coating of cylindrical samples for 3-D lithography" - Microelectronics International No.36, p.22, January 1995.


- L.Mini, C.Giaconia, and C.Arnone: "Copper patterning on dielectrics by laser writing in liquid solution" - Appl. Phys. Lett. 64, 3404 (1994)


- C.Arnone, C.Giaconia, C.Pace and M.Greco: "Flexible laser tracing systems for defining thin film hybrid geometries" - Hybrid Circuits No.33, January 1994.


- G.B.Scelsi, J.Notaro and C.Arnone: "Laser direct writing of gold conductors from metallo-organic inks" - Advanced Materials for Optics and Electronics 2, 93 (1993).


- C. Arnone: "The laser-plotter: a versatile lithographic tool for integrated optics and microelectronics" - Microelectronic Engineering 17, 483 (1992).


- C.Arnone and G.B.Scelsi:  "Anisotropic  laser etching of oxidized (100) silicon" - Appl. Phys. Lett. 54, 225 (1989).


- M.Rothschild, C. Arnone, D.J.Ehrlich: "Laser photosublimation  of compound semiconductors" - J.Mater.Res.,2, 244 (1987).


- C.Arnone, M.Rothschild, J.G.Black and D.J.Ehrlich: "Visible-laser photodeposition of  chromium  oxide  films and single crystals" - Applied Physics Letters, 48, 1018 (1986).


- C.Arnone,  M.Rothschild  and  D.J.Ehrlich:  "Laser etching of 0.4-micrometer  structures  in CdTe  by  dynamic light-guiding" - Applied Physics Letters, 48, 736 (1986).


- M.Rothschild, C.Arnone and D.J.Ehrlich: "Excimer laser projection patterning with and without resists: submicrometer etching of diamond and diamond-like carbon resist" - Proc. of SPIE,663 (1986).


- M.Rothschild, C.Arnone and D.J.Ehrlich: "Excimer-laser etching of diamond and hard carbon films by direct writing and optical  projection" - Journal of Vacuum Science Technology B, 4, 310 (1986).


- C.Arnone, M.Rothschild and D.J.Ehrlich: "Laser-induced  submicrometer  etching of  II-VI compounds"  -  1985  Fall Meeting of M.R.S., Boston, December 2-7, 1985.


- M.Rothschild, C.Arnone, D.J.Ehrlich: "Submicrometer excimer-laser microchemistry by optical projection" - 1985  Fall Meeting of M.R.S., Boston, December 2-7, 1985.


- M.Rothschild, C.Arnone and D.J.Ehrlich: "Excimer-laser etching of diamond by direct-writing and optical projection" - 29th International Symposium on Electron, Ion  and  Photon Beams, Portland (Oregon), May 28-31, 1985.



Thin film technology


- V. Marino, C. Galati, C. Arnone, “Optimization of fluorescence enhancement for silicon-based microarrays”, J. of Biomedical Optics 13(5), 054060 (2008).


- P. Cusumano, A. Mangione, G. Lullo and C. Arnone: “Graded reflectivity micromirror arrays”, Applied Optics 41, p 143 (2002).


- C.Zizzo, C.Arnone, C.Cali', S.Sciortino: "Fabrication and charac terization of tuned  gaussian mirrors for the visible and the near infrared" - Optics Lett. 13, 342 (1988). 


- S.De Silvestri, P.Laporta, V.Magni, O.Svelto, C.Arnone, C.Cali',S. Sciortino, C.Zizzo: "Nd:Yag laser with  multidielectric  variable reflectivity output coupler" - Optics Communications, 67, 229 (1988).


- C.Arnone, C.Cali', S.Riva-Sanseverino: "Light-induced sublimation of Cadmium Sulfide"  -  Springer Series in "Chemical Physics 39": "Laser Processing and Diagnostics",  Ed: D.Bauerle,  pag. 379-385, Springer-Verlag (1984).


- C. Arnone, C.Cali', S. Riva Sanseverino:  "Study of photo-induced thin film growth on CdS substrates" - Proc.  of  MRS:  Laser-Controlled Chemical Processing of Surfaces,  Elsevier  Science  Publishing Co., vol.29 (1984).


- C.Arnone,  C.Cali',  M.L.Rimicci,  S.Riva-Sanseverino: "Laser film thickness modulation and induced small pattern generation"- Journal of Non-Crystalline Solids, vol.47, 2 (1982), pp.263-266.


- C.Arnone, V.Daneu, S.Riva-Sanseverino: "Effect of laser light  on the sticking coefficient in ZnS  thin-film  growth" - Appl. Phys. Letters, vol.37, 11 (1980).



Material characterization


- G. Carini, G. Camarda, Z. Zhong, D.P. Siddons, A.E. Bolotnikov, G.W. Wright, B. Barber, C. Arnone, and R.B. James: “High-energy X-ray diffraction and topography investigation of CdZnTe”, Journal of Electronic Materials, 34, No.6, p. 804-810 (2005).


- I.M.Catalano, A.Cingolani, C.Arnone, S.Riva-Sanseverino: "Optical rectification in CdS" -  Solid State Communications , vol. 49, 12 (1984) 1139-1141.


- C.Warde, C.Arnone: "Characterization of defects in photorefractive materials" – section 13, SPIE conference on  Spatial Light Modulators and Applications (1984).


- I.M.Catalano, A.Cingolani, C.Arnone, S.Riva-Sanseverino: "Optical rectification and photon drag in p-type InAs at 10.6 µm" -  Solid State Communications, vol.37, 2 (1981).





- Arnone Claudio et al.: "Diffrattografo ottico ad alta risoluzione spazio-temporale per scattering statico e dinamico”, Italian patent no. GE 99 A 000040, 14 April 1999.


- D.J.Ehrlich, C. Arnone, M.Rothschild: "Method and  apparatus  for photodeposition  of  films  on surfaces" -  United States Patent number 4,668,528 - May 26,1987.





- F. Giambruno, C. Arnone: "High Reliability Laser Tracking System", proc. of the 55th International Astronautical Congress, Vancouver, Canada, paper IAC-04-IAF-U.2.08, October 2004.


- M.U. Palma, M.B. Palma-Vittorelli, A. Emanuele, M. Manno, S.M. Vaiana, C. Arnone, G. Lullo, A. Maggio, A. Giambona: "Optical diffractometer for simultaneous static and dynamic light scattering with high angular and time resolution", proc. INFM Meeting, Roma-Eur, 18-22 giugno 2001.


- C. Arnone, C. Giaconia, and G. Lullo: "Fabrication of Diffractive Optics: surface relieves and artificial dielectrics", in Diffactive Optics and Optical Microsystems, pp.119-131, Plenum Press (1997).


- C.Arnone: voce OPTOELETTRONICA  della Enciclopedia Italiana fondata da Giovanni Treccani, V appendice, pp. 772-774 (1994).